| 摘要 |
PURPOSE:To obtain the title device simple in structure and suitable for a fine movement device of stepwise straight advancement, by a method wherein two horizontal beams and three vertical beams joining these are formed into an integral body, thus providing driving electrodes to the two horizontal beams and at least two vertical beams right and left. CONSTITUTION:Electrodes 3a, 3b are deposited on both surfaces of piezoelectric vertical beams 2a, 2b, respectively; and, electrodes 4a, 4b are deposited only on both surfaces of horizontal beams 1a, 1b. These beams are constructed of a continuous integral material. The horizontal beams 1a, 1b and vertical action beams 2a, 2b are polarized to the beam thickness direction as shown by arrows Px, Py; when a voltage is impressed across the electrodes, each beam expands and contracts in accordance with the voltage polarity at a right angle to the direction of polarization by piezoelectric lateral effect. In the case of fixing the horizontal beam 1b, when the distances from a vertical fixed beam 2c to the moving ends of the beams 2b and 1a are (a), (b), respectively, the vertical displacement amount DELTAy1 is enlarged by a factor of about b/a, i.e. to DELTAy2 at the moving end of the beam 1a. |
