| 摘要 |
PURPOSE:To obtain a large variation of output pressure by introducing the output pressure into the intermediate space between two diaphragms so as to increase the pressure gain. CONSTITUTION:A flapper 22 consists of an electrostrictive element, and diaphragms consist of a pair of diaphragms 30 and 32. The through hole of a nozzle 18 is faced to the diaphragm 30 n one side, and a passage introducing the output air pressure is faced to the intermediate space between the two diaphragms 30 and 32, and a passage 53 introducing the output air pressure is branched and communicated to a pressure sensor 68 which is provided inside the unit body. Further, the effective area of the diaphragm 32 on one side which made displacement in response to the variation of nozzle back pressure is made greater than that of the diaphragm 30 on the other side. By this constitution, larger variation of output pressure can be obtained.
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