QUANTITATIVE ANALYSIS IN ENERGY LOSS ANALYZER

摘要

PURPOSE:To enable exact determination of the quantity of the objective element incorporated into a sample even if the sample is thick by introducing a thickness factor as a function of the relative thickness of the sample. CONSTITUTION:Electron rays are irradiated to the sample. The electrons past the sample are conducted to an energy analyzer by which the quantity corresponding to the integrated intensity It in the entire energy region of the spectra and the quantity corresponding to the integrated intensity Is in the peak region of the specific element are determined from the spectrum signal obtd. therefrom. The relative thickness tr of the sample is determined by the equation I (in the equation I, t denotes the thickness of the sample and lambdaP denotes the average free path of the electrons) using the integrated intensity I0 of a zero loss peak. The thickness factor T(tr) expressed by the equation II where m, n are positive numbers is calculated and the number M of the specific element is calculated by the equation III using a scattering sectional area value sigma.