| 摘要 |
PURPOSE:To find trouble in an early stage by installing an acoustic signal sensor on the bearing surface, and by detecting eventual failure of bearing clearance from the pressure air stream sound flowing through the bearing clearance. CONSTITUTION:In this static pressure pneumatic bearing 2, an air introduction hole 21 is bored in its central part, the base end is connected to the pressure air source through a vent pipe 22, and the tip of said air introduction hole 21 forms an orifice 24 opened in the bearing surface 23 by contracting the diameter. In this bearing surface 23 a recess 25 is formed surrounding said orifice 24. A mounting recess 26 is formed in an appropriate place on the bearing surface 23, and an acoustic signal sensor 3 named acoustic emission sensor is embedded in this recess 26, wherein the receiving surface 31 is in a plane with the bearing surface 23. Any acoustic signal due to stream of compressed air in the bearing clearance 5 between the bearing surface 32 and bearing guide face 4 is sensed to provide information about eventual failure of the bearing clearance 5. |
