摘要 |
PURPOSE:To prevent cracking of the alumina substrate and improve quality by providing an auxiliary layer in the laser subscribe area on the alumina substrate, and irradiating the laser beam along the auxiliary layer to form scribes. CONSTITUTION:Conductive paste or glass paste is printed in the scribe area 4 on the alumina substrate 1, and sintered to form auxiliary layers 5. Then, laser beam is irradiated on the auxiliary layer 5 to draw scribe lines 4 in the scribe area on the alumina substrate 1. In this process, the auxiliary layer 5 absorbs the laser beam to lower the laser power density. Thus, scribe lines 4 with a minute width are drawn in the scribe area on the alumina substrate and the substrate is free of cracking. |