发明名称 MANUFACTURE OF ANGULAR VELOCITY SENSOR
摘要 PURPOSE:To enable tuning fork vibration in horizontal symmetry eliminating non-matching between right and left vibrators with a higher design accuracy, by cutting and grinding the free end of a piezo-electric bimorph element using a laser and a sand blasting to keep the driving frequency of an angular velocity sensor constant with the regulation of the resonance frequency of the vibrators. CONSTITUTION:The free end of a limorph element 1 for detection is composed of one piezo-electric element to make an angular velocity sensor. Here, a CO2 gas laser is used to cut a portion made up of a piezo-electric element at the free end of the piezo-electric bimorph element 1 for detection. This keeps the driving frequency of the angular velocity sensor constant to eliminate non- matching between right and left vibrators thereby providing a sensor with a stable property, causing no variance among sensors.
申请公布号 JPS61181913(A) 申请公布日期 1986.08.14
申请号 JP19850022267 申请日期 1985.02.07
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KIMURA RYO;YAMAGUCHI HIROSHI
分类号 G01P9/04;G01C19/56 主分类号 G01P9/04
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