摘要 |
PURPOSE:To achieve accurate measurement of fine particles, by deaerating a liquid with a reduction in the pressure at a gas layer part in a deaerator while the temperature of the liquid is lowered to eliminate the effect of bubbles on the measurement fine particles in the liquid. CONSTITUTION:To make bubbles in a liquid hard to generate, the temperature of a liquid to be measured is set with a thermocontroller (thermoelectric refrigerating element) 3 down to 5-10 deg.C lower by 10-15 deg.C than the operating temperature by cooling. Then, to remove the bubbles, a deaerator (a vacuum deaerator) 5 is used and the pressure is reduced with a pressure reduction pump by about 30 Torr at an gas layer part in the equipment. The liquid subjected to the above-mentioned processing is measured with a liquid-in fine particle measuring sensor 2. This enables accurate measurement of fine particles in the liquid free from effect of bubbles in the liquid. |