| 摘要 |
A device for the optical determination of low-order errors in shape, for example unevenness. The device comprises a light source (1), the light of which scans the body to be examined, and a light-receiving system (5) for the light reflected from the body (4). The device is characterized by the fact that the light-receiving system (5) consits of a plurality of light-receiving elements arranged in the form of lines, and by the fact that an evaluation unit determines the inclination angle of the scanned surface element of the body on the basis of all output signals of the light-receiving elements. This system offers the remarkable advantage that it is possible to measure shifts in the focus of the reflected light beam which are essentially under the width of a light-receiving element. Furthermore, the measurement result is virtually unaffected by higher-order deviations in shape, such as roughness etc. |
