| 摘要 |
PURPOSE:To check cross talk of signal between an upper and a lower layer by a method wherein a conductor, whose electric potential is fixed, is disposed in an interlayer insulator of a three-dimensional circuit element. CONSTITUTION:The first to the fourth layers 40, 41, 42, 43 work respectively with its function. The first layer circuit 40 represents a circuit which three graded contact of an inverter is performed, the second layer circuit 41 represents a NOR circuit, the third layer circuit 42 represents a NAND circuit and the fourth layer circuit 43 represents a photo diode and a transistor for switching. At the circuit 40, grounding potential is obtained from a P-type Si substrate 31 and a power source potential is obtained from the conductor 1. In the same way, the conductor 2 supplies commonly substrate potential to the circuit 41 and the circuit 42, and the conductor 3 supplies commonly substrate potential to the circuit 42 and the circuit 43. Since the electric potential of the conductor 1, 2, 3 are fixed to grounding potential or power source potential, signal cross talk of each interlayer is checked completely. |
