| 摘要 |
<p>PURPOSE:To lessen the capacity of memory to be stored for an inspection on a pattern and to contrive to miniaturize a pattern inspecting device by a method wherein plural unit patterns and a connecting information for the unit patterns are memorized, the unit patterns are reconstituted on the basis of the connecting information and the reference pattern is obtained. CONSTITUTION:A pattern 1 to be inspected is detected by a line sensor 6 by performing a scanning. The pattern 1 detected is compared with a signal S8 to be outputted through a delay circuit 8 in a comparison circuit 9. A repetitive pattern defect signal S9 is outputted from the comparison circuit 9. The stratified patterns of the pattern to be inspected are memorized in a stratified pattern memory 12. The operating position of a moving stand 2 is detected by a position detector 3 and the operating position signal is outputted to a starting control circuit 15. The pattern 1 to be inspected at this position is extracted in the stratified pattern memory 12 through a readout circuit 13 and a synchronous signal generating circuit 16. The stratified patterns to be reconstituted in the memory 12 on the basis of the pattern 1 inputted newly are compared with the defect signal S9 in a defect characteristic extracting circuit 10 and an output S10 is obtained.</p> |
