| 摘要 |
PURPOSE:A device for carrying out liquid phase growth in good reproducibility in high productivity, by setting a regulator to control a transfer distance of a substrate holder with time by the temperature of a heater and an automatic loader. CONSTITUTION:A device consisting of the slidable substrate holder 3 to keep the substrate 1, the slide boat 2 to put the raw material melts 5-8 in it, the operation bar 4 to draw the substrate holder 3 out, and the heater 14, wherein the automatic loader 16 is connected to the operation bar 4, and the automatic loader 16 is provided with the automatic loader programmer 18 to control a distance that the automatic loader makes by drawing the operation bar 4 with time. The heater 14 is equipped with the temperature control programmer 17 to regulate temperature with time. In order to check whether the automatic loader 16 and the heater 14 are operated according to a program, the automatic loader 16 is provided with the position detector 20 to detect the distance that the automatic loader makes by drawing the operation bar 4, and the substrate holder 16 is equipped with the temperature detector 19 using the thermocouple 13 to detect growth temperature, and malfunction, trouble, etc. are detected. |
