| 摘要 |
PURPOSE:To improve detection resolution and precision by arranging pattern wiring and poles across an electric thin-film insulating layer and preventing an increase in the size of a device and the generation of crosstalk. CONSTITUTION:A receiving pole 12 and a transmitting pole 18 are arranged. Then, the pattern wiring is provided between a substrate 26 and the electric thin-film insulating layer 32, and the pattern wiring and transmitting poles 18 are coupled together electrically by using a conduction part. Therefore, only the electric insulating thin-film layer 32 which is much thinner than the substrate 26 is present between the pattern wiring and transmitting poles 18. Further, even when transmitting poles 18a reduced in width to one tenth as much as before and arranged to high density, the conduction part is formed easily and securely, and the measuring performance is improved and the device is reduced in size.
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