发明名称 ARTICLE TRANSPORTING DEVICE IN CLEAN ROOM
摘要 PURPOSE:To prevent the cleanliness in a room from degradation by making a transfer medium of liquid to eliminate dust generated by friction or the like of a transfer means. CONSTITUTION:Liquid A in a liquid storage tank 7 flows through a slit into a main trough 1, and works float through pallets or directly on the liquid A and are transferred in the main trough 1 to be recovered at a stopper position. On the other hand, the liquid A is reflected from a receiving cover 2 to flow into a returning trough 3, and stored temporarily at the delivery side in a tank 4 to be returned to the storage tank 7 by a circulating pump 5 and a pipe 6. And flow flowing from the storage tank 7 to the main trough 1 is adjusted by adjusting the position of a control member to vary the width of the slit and the horizontally and gradient of the main trough 1 and the gradient of the returning trough 3 are adjusted by an angle adjusting mechanism.
申请公布号 JPS61178325(A) 申请公布日期 1986.08.11
申请号 JP19850020490 申请日期 1985.02.05
申请人 CANON ELECTRONICS INC 发明人 KIN HISASHI
分类号 B65G11/20;B65G51/03;(IPC1-7):B65G51/03 主分类号 B65G11/20
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