| 摘要 |
PURPOSE:To prevent flattening of an image and identify accurately surface roughness of an article, by irradiating a beam of light to a specimen measuring surface from the oblique direction with the required inclined angle of the irradiation center axis from the light source relative to the image developing center axis. CONSTITUTION:A pair of suction drums 2, 3 is installed on a inspection machine, contacting one, with the other on each drum 2 and 3, a specimen. As and an article A to be inspected are placed by suction. Further, on each drum 2 and 3, image developing machines 4, 5 and light sources 6, 7 are installed in an opposed manner and the one machine 4 and a source 6 take photograph of the surface of the article A and the other machine 5 and the source 7 the rear surface. Further, position detecting means 8, 9 detect that the article A has arrived at the photographing position. And, the irradiating center axis 12 from the sources 6, 7 is made to deviate from the image developing center axis 10 through the required angle alpha and a beam of light from the sources 6, 7 is irradi ated obliquely to the entire measuring surface of the article A. And, thus flattening of the developed image is prevented and identification of surface roughness of the article A is easily made. |
