| 摘要 |
PURPOSE:To disperse and stick individual ultrafine particles onto a substrate by evaporating the ultrafine particles of a specific material in a reduced pressure chamber, sucking the particles through a fine hole into a vacuum chamber where a supporting plate is installed and sticking the particles together with a dispersion medium onto the surface of the support. CONSTITUTION:An outside bell-jar chamber 10 of a device constituted of an outside bell-jar 8 and an inside bell-jar 9 is evacuated and an inside bell-jar chamber 11 is evacuated to an extremely high vacuum state. A boat 5 in the chamber 10 is heated to evaporate the metal, etc., as the ultra fine particle raw material in the boat. The ultrafine particle of the evaporated metal is sucked through the fine hole 20 of the bell-jar 9 into the chamber 11. The evaporatable material such as SiO in a boat 23 is evaporated as the dispersion medium in the chamber 11. The substrate stuck densely with the ultrafine particles on the surface of the support 1 apart from each other without being connected to each other is thus produced together with the ultrafine particles.
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