| 摘要 |
PURPOSE:To form a uniform coating layer by preventing the disturbance of the surface of the liquid in a container, by providing a coating solution replenishing region partitioned by a buffer wall in a coating solution receiving container and providing an overflow discharge hole to said region. CONSTITUTION:A coating liquid 13 is continuously replenished to a coating solution replenishing region 111 from an external supply means through an injection port 113 in the amount corresponding to the amount of the coating solution consumed during a coating process. At this time, the surface of the solution in a coating region 112 can be held to a stable state by the presence of a buffer wall 11 without being disturbed by the replenished solution. At the same time, the excessive coating solution 13 in the container 1 is equally discharged out of the container 1 from the overflow discharge holes 12 provided to the container 1 so as to pierce the entire peripheral wall 10 thereof and, therefore, the disturbance of the surface of the solution in the coating region is not generated and the change in concn. or viscosity is suppressed to a reduced degree. |
