发明名称 MANUFACTURING DEVICE OF RESIN TABLET FOR SEALING SEMICONDUCTOR
摘要 PURPOSE:To stably mold a high quality tablet, the specific gravity of which is 90% or more of that of each of transfer moldings by a method wherein a cooling box is annexed to the main spindle of a rotary tablet machine and at the same time cooling mechanism is provided on each one of a large number of molds attached on a rotary table in order to feed refrigerant through the main spindle. CONSTITUTION:A mold 1 is equipped with a holder 6, on which a spiral groove 7 is provided so as to be fed with refrigerant from a refrigerant cooler 8 by means of a circulating pump 9. As a result, the heat developed during the compression by an upper and a lower punches 4 and 5 is effectively removed and at the same time the frictional heat during the withdrawal of a tablet from the mold is also removed. Because a rotary table 10, on which the molds are mounted, rotates, a stationary cooling box 11 is attached to a main spindle 12 rotating together with the rotary table 10. The cooling box 11 is perfectly sealed with sealing parts 15 composing of oil seal, gland packing, O-ring or the like onto the main spindle 12 in order to prevent the refrigerant from leaking.
申请公布号 JPS61177210(A) 申请公布日期 1986.08.08
申请号 JP19850018267 申请日期 1985.02.01
申请人 SHIN ETSU CHEM CO LTD 发明人 YOSHIDA TETSUO;SHIMIZU SHINICHI;KANEDA MASARU
分类号 H01L21/56;B29B11/06;B29B11/10;B29C45/02 主分类号 H01L21/56
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