| 摘要 |
PURPOSE:To facilitate the die test of a plurality of macro-cells as well at to enable to cut down the period of evaluation and the cost of the macro-cells by a method wherein a plurality of evaluation macro-cells are arranged by kind at the unit of row or column. CONSTITUTION:A so-called composite wafer, consisting of a plurality of macro- cells A, B, C and D formed on a wafer 10, is tested by a tester using the mask whereon a plurality of kinds of evaluation macro-cells are arranged with a row as a unit for every kind. For example, first, macro-cells A... of the first row are evaluated successively, and then the macro-cells B... of the second row are evaluated successively. The evaluation is continuously performed down to the last row in the same manner as above. As a result, a die test can be performed, and as a kind of mask is enough, the evaluation of a composite wafer can be performed easily and effectively by a wafer setting operation. |
