FORMATION OF HIGH HARDNESS CARBON FILM

摘要

PURPOSE:To increase the adhesive strength of a carbon film to a substrate by forming the surface of the substrate as a chemically active surface where oxygen atoms remain then depositing a carbon component thereon. CONSTITUTION:Gaseous argon 7 is introduced and sprayed to the substrate 16 in a vacuum vessel 11 to clean the surface of the substrate 16. Gaseous oxygen 8 is then introduced into the vessel and high-frequency current is passed to an excitation coil 2 from a high-frequency power source 1 to form plasma in a glass tube 9. The ions in the plasma past an electrode 13 are accelerated toward and electrode 14 and are injected to the surface of the substrate 16 to form the active surface where the oxygen remains when DC current is impressed to the electrodes from a DC power source 15. Gaseous hydrocarbon 6 and gaseous argon 7 are introduced into the vessel and are converted to the plasma which is injected to the surface of the substrate 16 to form the carbon film contg. a very slight amt. of argon and hydrogen on the surface of the substrate 16. The high-hardness carbon film is thus formed on the surface of the substrate 16 with high adhesive power.