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发明名称
摘要
申请公布号
JPS6134255(B2)
申请公布日期
1986.08.06
申请号
JP19760107543
申请日期
1976.09.08
申请人
NIPPON ELECTRIC CO
发明人
YAMANAKA YOJI;WADA TOSHIO
分类号
H01L29/78;H01L21/3205;H01L21/336;H01L23/52
主分类号
H01L29/78
代理机构
代理人
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