| 摘要 |
PURPOSE:To form a covered layer coated with boron nitride having superior denseness and high hardness by forcing the mixed gas of nitrogen and boron hydride to pass through the inside of a reaction vessel during electric discharge and then by introducing the mixed gas onto the heated surface of a substrate at a specified temperature. CONSTITUTION:The pretreated substrate is placed in the reaction vessel, the air is exhausted from said vessel and the substrate is heated up to 200-1,500 deg.C. Electric discharge is carried within said vessel by a direct current, high-frequency and microwave, and >=1 kinds of the mixed gas selected from hydrogen, boron hydride, borazine or borazine derivatives is forced to pass through during electric discharge. The mixed gas is introduced onto the heated substrate surface and a covered layer coated with boron nitride is formed on the substrate surface. In addition, in this case the internal pressure within said vessel is regulated to about 0.001-300Torr and the thickness of the covered layer coated with boron nitride is regulated to about 0.03-30mu.
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