| 摘要 |
PURPOSE:To improve the wear-resistance of a sleeve by forming a thin film made of Ni, Cr, Al2, O3, TiC or the like on the inner surface of the sleeve supporting a rotary shaft of a fluid bearing type cylinder device. CONSTITUTION:A sleeve 12 is performed on a lower cylinder 11 of a fluid bearing cylinder type device, and a rotary shaft 16 connected to an upper cylinder is disposed inside the sleeve. Herringbone dynamic pressure generating grooves 13a, 13b are formed on the inner peripheral surface of the sleeve 12 that contacts the rotary shaft 16, and a thin film made of Ni, Cr, Al2, O3, TiC or the like is formed thereon. Therefore, even if the rotary shaft rotates at a low speed, and the rotary shaft and the sleeve directly contact each other, the inner peripheral surface of the sleeve is kept from abrasion.
|
