| 摘要 |
PURPOSE:To obtain a coating film with a uniform thickness, by forming a liquid sump space having a hermetically closed structure between a support and a rotary bar and providing coating solution introducing and discharge ports at the specific position in said space. CONSTITUTION:A coating solution introducing port 24 is positioned below the lowermost surface 29 of a rotary bar 20 and a coating solution discharge port 26 is positioned above the lowermost surface 29 of said rotary bar 20 while the diameter of the introducing port 24 is formed so as to be made larger than that of the discharge port 26. Therefore, pressure is applied to the coating solution introduced into the space 3 formed into a hermetically structure by a support and the rotary bar 20 and the space 30 is sufficiently filled with the coating solution and, therefore, the coating solution is uniformly adhered to the rotary bar 20 and the thickness of a coating film also becomes uniform. Because the liquid sump space 23 has the hermetically closed structure, the evaporation of the coating solution is reduced and the change in the viscosity of the coating solution is reduced even if the coating solution is used while recirculated.
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