| 摘要 |
PURPOSE:To decide easily an observation region and its distribution which are impossible to be decided by an operator by giving a detection signal of decision impossibility when the decided result of a decision circuit does not coincide with known existence of a defect of a material body to be observed as a standard sample. CONSTITUTION:At the time of a test mode, the material body 4 to be observed as the standard sample of which the existence of the defect is known previously is picked up by a TV camera 3. As the result, when the decided result of the decision circuit 8 does not coincide with the known existence of the defect of the material body 4 to be observed as the standard sample concerned, the decision circuit 8 gives the detection signal DEN of decision impossibility to indicate that the decision is impossible under the observation condition concerned. At this time, a cursor pattern display controlling part 21 moves a cursor to the position or in its neighborhood of the observation region where the abnormal decided result is obtained in the display scope DES of a monitor 23 and thus, the impossibility of the decision and the distribution of the observation region of the decision impossibility are displayed on the display scope DES of the monitor 23. |
