FORMATION OF CONDUCTIVE GRAPHITE FILM

摘要

PURPOSE:To form a graphite film having excellent conductivity by forming a carbon film by plasma discharge on a substrate heated to a relatively low temp. with gaseous hydrocarbon as a raw material then subjecting the film to a heat treatment at an adequate temp. CONSTITUTION:The inside of a reaction chamber is filled with the gaseous hydrocarbon to a prescribed pressure and a high-frequency electric field is impressed thereto to induce the plasma discharge by which the carbon film is formed on a base material heated to >=700 deg.C. The base material contg. a transition metal in particular is preferable as such material acts as a catalytic material for graphitization reaction. The above-mentioned carbon film is thereafter heat-treated at >=2,000 deg.C temp. to form a conductive graphite film. The graphite film is thereafter doped with a suitable dopant, by which the conductivity is additionally improved.