| 摘要 |
PURPOSE:To increase the productivity by installing the light source in the center of the reaction chamber where almost all light from the source are radiated and making it possible to arrange the substrates in all directions. CONSTITUTION:An ultra-violet ray lamp 11 of the bar type as the light source is installed on the central axis of the hollow part of the hollow cylindrical reaction chamber 10. The inside wall 12 in contact with the hollow part of the reaction chamber 10 are made of transparent cylindrical material. The pressure in the space S1 and the space S2 are always measured, and the inactive gas supplying means 17 and the process gas supplying means are so controlled that the pressure in the space S1 becomes higher than the pressure in the space S2. In this situation, the process gas does not flow into the space S1 from the space S2, because the inactive gas flows from the space S1 into the space S2 is viscous. Hence, the film caused by decomposition of the process gas is not formed on the surface of the inside wall 12 and the surface and the holes of contamination preventing cylinder 15, and the penetration of the ultra violet ray from the ultra violet ray lamp 11 is not obstructed at all. |
