INFRARED LINEAR ARRAY ELEMENT

摘要

PURPOSE:To decrease the stray capacity generated between lead-out electrodes and substratum electrode by interposing a thin film consisting of a material having the dielectric constant lower than the dielectric constant of a thin pyroelectric material film between the lead-out electrodes and the thin pyroelectric material film. CONSTITUTION:The platinum substratum electrode 8 is formed on a substrate 7 consisting of an MgO single crystal subjected to cleaving at 100 and mirror polishing. The thin pyroelectric film 9 consisting of PbTiO3 is then grown thereon. A thin Al2O3 dielectric film 10 is formed on the film 9 except the photodetecting part. An NiCr photodetecting electrode 11 is deposited by evaporation to a linear array shape and the platinum lead-out electrodes 12 are formed. The stray capacity generated between the electrodes 12 and the electrode 8 is decreased and the output of the pyroelectric material 9 is increased by interposing the dielectric layer 10 therebetween in the above-mentioned manner.