| 摘要 |
PURPOSE:To obtain thin film of soft magnetic material which presents small irregularity of characteristics and shows little deterioration of the frequency characteristics and the Barkhausen noise even in the curved path of magnetic flux, by forming two- layered structure of the films of soft magnetic material which sandwiches a non- magnetic thin film, and annealing this element in the magnetic field generated by flowing the bias current. CONSTITUTION:When the bias current IB is supplied along the horseshoe pattern from the terminals 5 and 6, the bias current IB branches into the three paths corresponding to the electric resistance of the non-magnetic film 2, the first and the second thin films of soft magnetic material 1 and 3. Each of them generates the magnetic field perpendicular to the bias current IB. One part of the magnetic field penetrates the first and the second thin films of soft magnetic material 1 and 3 and magnetizes them. The directions of each magnetization M are inverse with each other and perpendicular to the bias current IB. In order to make the magnetization M in the direction of the magnetic field generated by the bias current IB easy to saturate, the thickness of the non-magnetic film 2 is so set that the first thin film 1 and the second thin film 2 have the magnetostatic coupling to reduce the demagnetization caused by their forms. Thus, annealing is performed under the condition of predetermined time and temperature.
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