| 摘要 |
<p>PURPOSE:To separate a pellicle frame from a mask without any damage by hooking the opening part of the pellicle frame to the engaging part of a jig and separating the pellicle frame which is energized with tensile force by the jig from the mask fixed to a fixation table. CONSTITUTION:At least a couple of opening parts 30 and 30 are formed facing the flank of the annular pellicle frame 1 and filters 31 and 31 for preventing the entry of dust, etc., are provided in the opening parts 30 and 30; and the pellicle separating jig 40 is hooked in those opening parts 30 and 30 to separate the pellicle frame 1 from the mask 1 fixed on the fixation table 50. Thus, the pellicle frame 1 where a pellicle 2 is stuck is separated from the mask 10 easily and accurately without damaging the pellicle frame 1 not the mask 10.</p> |
