| 摘要 |
PURPOSE:To enable a higher sensor sensitivity, by providing one sheet of SAW device with a differential function to facilitate the manufacture and simplify the mechanism of a sensor. CONSTITUTION:A cross pointer type electrode IDT2 for transmission is provided on the surface of a piezo-electric based substrate 1 and cross pointer type electrodes IDT3a and 3b thereon to receive SAW to form a SAW device. The piezo-electric based substrate 1 is fixed at both ends thereof with a member 6 for fixing both ends. A pressure is to be applied almost at the center of the substrate to deform the surface of the substrate in such a manner as to be bent in convexes and concaves on the right and left of the pressure applied point. This deformation is realized by applying a rotary stress at the pressure applying point. So to speak, a cantilever is fastened to almost the center of the piezo-electric substrate to apply an external force and the longitudinal motion of the external force is converted to rotary motion with the action of the cantilever. |
