| 摘要 |
PURPOSE:To enable the rising in temp. to printing temp. by low power, by providing a narrow glaze layer, which has a protruded part of which the top part is protruded so as to be made higher than the other part, on an insulting substrate and further providing a resistance layer or a protective layer on said glaze layer. CONSTITUTION:A glaze layer 2 is formed to an insulating substrate 1 made of alumina and a Ta thin film 3a is formed thereon by sputtering. The Ta thin film part is etched by fluoric acid so as to leave the vicinity of the top part of the glaze layer 2 to form a Ta thin film 3b. Heat-treatment is performed at about 700 deg.C for about 2hr in the atmosphere to convert the Ta thin film 3b to a Ta2O5 thin film. Further, a Ta2O5 under coat layer 4 is provided and a resistor layer 5 comprising Ta2N is formed thereon and an aluminum conductor layer 6 is further formed thereon. Subsequently, an SiO2 layer and a Ta2O5 layer are successively formed to provide a protective layer 7 to form a thermal head. |
