摘要 |
<p>@ A method for chemically-mechanically polishing detector material (24) such as mercury cadmium telluride (HgCdTe) to obtain damage free surfaces uses a solution of potassium-iodine iodide in a deionized water base, in combination with an inert lubricant, such as ethylene glycol, and a semisoft porous polishing pad (12) made from, for example, an expanded polyurethane material.</p> |