发明名称 Method for polishing detector material.
摘要 <p>@ A method for chemically-mechanically polishing detector material (24) such as mercury cadmium telluride (HgCdTe) to obtain damage free surfaces uses a solution of potassium-iodine iodide in a deionized water base, in combination with an inert lubricant, such as ethylene glycol, and a semisoft porous polishing pad (12) made from, for example, an expanded polyurethane material.</p>
申请公布号 EP0188756(A2) 申请公布日期 1986.07.30
申请号 EP19850116055 申请日期 1985.12.17
申请人 HONEYWELL INC. 发明人 FUSCO, ALBERT J.;COCHRAN, BRUCE C.
分类号 B24B37/00;H01L21/461;H01L29/221;(IPC1-7):H01L21/461;H01L29/22 主分类号 B24B37/00
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