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发明名称
HALBLEITERVORRICHTUNG UND VERFAHREN ZU DEREN HERSTELLUNG
摘要
申请公布号
DD237935(A1)
申请公布日期
1986.07.30
申请号
DD19850276805
申请日期
1985.05.30
申请人
ADW DER DDR,DD
发明人
BANISCH,ROLF,DD;TILLACK,BERND,DD
分类号
H01L21/30;(IPC1-7):H01L21/30;H01L21/72
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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