| 摘要 |
PURPOSE:To perform supply and recovery of wafers by the same cassette, by transferring all the wafers stored in the cassette to a stocker so as to empty the cassette, conveying the wafers from the stocker for treatment, and recovering the treated wafers into the original cassette. CONSTITUTION:A cassette 22A, in which wafers 2 that are not injected are accommodated, is mounted on the uppermost position. The wafer 2 is taken out of the lower stage side of the cassette 22A one by one and inputted into the lower side immediately beneath a dummy wafer 2d in a stocker 26A in sequence. All the wafer 2 in the cassette 22A are transferred to the stocker 26A. Then, the wafers 2 are sequentially supplied to a disk 4 from the lowest stage of the stocker 26A. After ion implantation, the wafer 2 is taken out of a position P1 of the disk 4 and recovered to the uppermost stage (i.e., original position) of the original cassette 22A through a space part S in the stocker 26A. The next wafer 2 in the stocker 26A is mounted on the position P1 of the disk 4, and the second ion implantation is performed. |
