| 摘要 |
PURPOSE:To achieve electrical connection of a highly reliable pellet and a lead, by constituting a tape carrier bonder by a pellet mounting table having a heating means, a bonding tool, which is positioned at the upper part of the pellet mounting table, and a pellet feeding means. CONSTITUTION:A tape carrier bonder is provided with a pellet mounting table 2, a bonding tool 3 and a pellet feeding means 4. A heater 5 is built in the pellet mounting table 2. The supplied pellet 1 can be heated from its back surface. A finger lead 7 comprising a copper foil and the like is fixed by films 6 comprising polyimide and the like. Thus a tape carrier 8 is formed. Electrical connection of the pellet 1 is performed by using the tape carrier 8. Gold is deposited on the uppermost layer of a bump electrode 1a. The electrode 1a can be heated through the pellet 1 beforehand. Thus thermal compression can be performed quickly. Application of large stress on a part of the bump electrode 1a can be avoided. |
