发明名称 SHAPE MEASURING INSTRUMENT
摘要 PURPOSE:To reduce memory capacity to only necessary data capacity by confirming the effectiveness of data at the output stage of a photoelectric element and outputting only effective data to a computer. CONSTITUTION:Current signals IX1 and IX2 are voltage-converted and amplified by amplifiers 7 and 8 and then inputted to a subtracter 9 and an adder 10 at the same time, and their outputs are inputted to a divider 11 to perform position arithmetic. Position information obtained as the output of the divider 11 is inputted as the X coordinate of a light point to the computer. At this time, the output of the adder 10 is constant when the light point is on a PSD (position sensing device) and 0 when the light point disappears from on the PSD. For the purpose, the output of the adder 10 is supplied to a binarization circuit 14 to detect whether there is the light point on the PSD or not. Further, a gate circuit 13 which receives the output of the circuit 14 as a control input and the output of an A/D converter 12 as a signal input is provided to inhibit data from being expelled when there is no light point on the PSD.
申请公布号 JPS61167805(A) 申请公布日期 1986.07.29
申请号 JP19850008706 申请日期 1985.01.21
申请人 SUMITOMO METAL IND LTD;MITSUBISHI ELECTRIC CORP 发明人 MATSUI KENICHI;KAMEI MITSUHITO;NAKAJIMA TOSHIRO
分类号 G01B11/24;H01L21/66 主分类号 G01B11/24
代理机构 代理人
主权项
地址