发明名称 THIN FILM ALLOY TARGET
摘要 PURPOSE:To make specialized techniques unnecessary in preparing an alloy target by adding Nd, a light rare earth metal, besides heavy rare earth metals. CONSTITUTION:This novel alloy target comprises Nd, a light rare earth metallic element; one or more kinds of heavy rare earth metallic elements; more than one kinds of Fe and Co; and some impurities. The total concentration of rare earth elements - light and heavy - is 10-50at%. This kind of alloy makes unnecessary specialized techniques in preparing an alloy target.
申请公布号 JPS61168222(A) 申请公布日期 1986.07.29
申请号 JP19850008804 申请日期 1985.01.21
申请人 SEIKO EPSON CORP 发明人 FUNADA SHIN;SHIMODA TATSUYA;SHIMOKAWADO SATOSHI;SUGIMOTO MAMORU;AOYAMA AKIRA;NEHASHI SATOSHI
分类号 C23C14/34;G11B11/10;G11B11/105;H01F10/12;H01F10/13;H01F41/18 主分类号 C23C14/34
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