| 摘要 |
PURPOSE:To eliminate the generation of a gas, etc., damaging the vacuum atmosphere by using as a driving source a piezoelectric motor utilizing the rotation moment generated in a rotor pressed on the end surface of an ultrasonic vibrator generating ultrasonic vibration. CONSTITUTION:A rewinding roll 3 and a winding roll 4 both using a piezoelectric motor 2 as a power source are placed on both sides of a vaporization source 5 in a vacuum vessel 1 of a vacuum vapor deposition device. A base film 6 can be continuously vapor-deposited while being moved along a guide roller 7. The film can be vapor-deposited, when needed, while being heated by a heater 8. The driving gear in the vacuum vessel never generates a gas causing the damage of the vacuum atmosphere that must be controlled to the utmost. Consequently, the gear can be operated safely for a long time in the vacuum vessel. |
