| 摘要 |
PURPOSE:To make possible the analysis of the compsn. and outside shape of an object to be measured with high accuracy by making the optical axes of radiation and laser light coincident with each other and irradiating the same to the object to be irradiated in such a manner that the radiation transmits the object and that the laser light is shielded by said object. CONSTITUTION:White X-rays are irradiated through collimators 3, 5 from a white X-ray source 2 to the object 7 to be measured and the white X-rays transmitted therethrough are made incident through a collimator 6 on a radiation detector 4 by which the compsn. of the object to be measured is analyzed. The laser light from a laser light source 6 is made incident on the 1st reflector 10 on the optical axis L of the white X-rays by which the laser light is so reflected as to be aligned to the optical axis L. The 2nd reflector 11 is provided on the optical axis L on the rear side of the object 7 to reflect the laser light and to make incident the reflected light on a laser light detector 9. The white X-rays transmit the object 7 but the laser light is shielded by said object when the object 7 is moved in the direction perpendicular to the optical axis L and therefore both end edges of the object are detected. The analysis of the compsn., width, outside diameter, etc. of the object with high accuracy is thus made possible.
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