发明名称 FORMATION OF THIN SULFIDE FILM
摘要 PURPOSE:To form a thin metallic sulfide film having good crystallinity easily and inexpensively by forming an org. metallic compd. layer having internally a metal-sulfur bond on a substrate then decomposing thermally the same in an inert gas contg. hydrogen sulfide. CONSTITUTION:The org. metallic compd. having internally at least one metal- sulfur bond is coated by printing, etc., on the substrate by using a suitable solvent and is then predried by heating to evaporate the solvent, by which the org. metallic compd. layer is formed. Various metallic mercaptides various metallic salt, etc., thiocarboxylic acid or dithiocarboxylic acid are usable for the above-mentioned org. metallic compd. The above-mentioned org. metallic compd. layer is thereafter thermally decomposed in the inert gas mixed with the hydrogen sulfide. The thin metallic sulfide film having good crystallinity is thus easily formed on the inexpensive substrate of glass, etc., in high productivity.
申请公布号 JPS61166978(A) 申请公布日期 1986.07.28
申请号 JP19850006417 申请日期 1985.01.17
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HASEGAWA HIROSHI;OKANO KAZUYUKI;NAKANISHI AKIRA;HATASE HIROSHI
分类号 C03C17/22;C01B17/20;C23C18/12;C23C20/08;C23C26/00;H01L21/36 主分类号 C03C17/22
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