| 摘要 |
PURPOSE:To make the production of a thin sulfide film having a large area and good quality at a low cost and with high productivity possible by decomposing thermally an org. metallic compd. layer having internally a metal-oxygen bond formed on a substrate in an inert gas mixed with hydrogen sulfide. CONSTITUTION:The org. metallic compd. having internally at least one metal- oxygen bond is coated by printing, etc., using a suitable solvent on the substrate and is then predried by heating to evaporate the solvent by which the org. metallic compd. layer is formed. Metallic alkoxide, carboxylate, acetyl acetonate or the deriv. thereof, sulfonate, etc. of metal are used for the above-mentioned org. metallic compd. The above-mentioned org. metallic compd. is thereafter thermally decomposed in the inert gas mixed with hydrogen sulfide by which the thin metallic sulfide film having the good crystallinity and film formability is easily formed.
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