| 摘要 |
PURPOSE:To prevent the mixing of electrical noise as well as to enable not to deterio rate the photoconduct quality of a sensor element of photoconducting type, by a method wherein the backside of a substrate on which an image sensor of $>photo conducting type is installed is made to have the shield effect and furthermore an electrode layer which is able to perform energizing and heating is provided. CONSTITUTION:An image sensor is composed of as follows. A sensor element S formed with a-Si and a common electrode are formed on a substrate 8, and furthermore an individual electrode 11 is formed on it through the intermediary of an insulation layer 10, and still more a passivation film 12 is formed on it, and an electrode layer 13 is formed at the backside of said substrate 8. When the readout of light information is performed, the mixing of electric noise to the image sensor part can be effectively prevented by making the electrode layer 13 to hold earth electric potential, said electrode layer 13 exhibiting electrical shield effect. At the time of non readout of the image sensor, joule heat is generated on said electrode layer 13 by energizing said electrode layer 13 by applying electric voltage and the sensor element S of photoconductive type at the image sensor part is heated, whereby sensor element of which photoconduct quality is deteriolated becomes to recover. Accordingly, the life of the image sensor becomes substantially longer. |
