| 摘要 |
PURPOSE:To enable to remove the intermediate reaction induced when the temperature of PH3 rises by a method wherein the PH3 is decomposed by photochemical reaction without heating the PH3. CONSTITUTION:As PH3 absorbs the light of 200-220nm, the PH3 can be decomposed without generating temperature rise when a photochemical reaction is performed utilizing said light. Accordingly, the PH3 is separated from other raw gas and introduced into a reaction pipe 11, a light is made to irradiate on the PH3 flowing the PH3 introducing pipe 12 from a light source 18 before the PH3 is introduced to the reaction pipe 11, and the PH3 can be decomposed much quicker than before. As the temperature rise is not generated at the PH3 introducing pipe 12 when the above-mentioned photochemical reaction is performed, there is no possibility of having the intermediate reaction which is generated in the past. |
