| 摘要 |
PURPOSE:To eliminate the gap between the chip-patterns, by providing the pattern for discrimination on the block and discerning the different blocks when a definite region on the substrate is exposed by applying the mask on which the block constituted of the patterns for several chips is printed and repeating the exposure of each block. CONSTITUTION:When a definite region on the substrate is exposed by applying the mask on which the block constituted of the patterns for several chips is printed and repeating the exposure of each block, the patterns for discrimination A and (a) are provided and the different blocks are discerned by the patterns for discrimination A and (a). If a pattern for discrimination is formed in each block and the exposure is done only in the case where the patterns coincide with each other, the confusion among chips in a block can be avoided. |
