发明名称 VACUUM CONTAINER
摘要 PURPOSE:To attain baking of degassing with better thermal efficiency by providing a shroud outside a container and laying a heater on the outer peripheral face of the container inside the shroud. CONSTITUTION:A vacuum container is provided with a container 11, a shroud 12 provided outside the shell of the container 11 and a heater 13 laid on the outer peripheral face of the shell of the container 11 inside the shroud 12. When performing degassing baking of the container 11 and parts in the container, predetermined parts are inserted in the container 11 and inside of container is made vacuum, and inside of the shroud is kept vacuum and the container 11 is heated by the heater 13. In this case, as the inside of the shroud 12 is kept vacuum, radiation of heat to the outside of the container becomes little, namely baking can be made with better thermal efficiency.
申请公布号 JPS61165096(A) 申请公布日期 1986.07.25
申请号 JP19840201602 申请日期 1984.09.28
申请人 HITACHI LTD 发明人 KANBARA HIDEAKI
分类号 F17C3/00;B01J3/00;H01L21/302 主分类号 F17C3/00
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