| 摘要 |
PURPOSE:To accurately control to position at a high speed by feeding back a difference signal between a detected deflection signal and a simulated deflected signal from a model circuit to the model circuit to correct the simulated deflection and a deflection speed signal by this operation. CONSTITUTION:A piezoelectric actuator 1 of a bimorph structure used for a servo device for a piezoelectric actuator is secured at one end side to an immovable unit 3, and mounted at the other end side with a deflection detector 5. A deflection signal S7 fed through a converting amplifier 7 from the detector 5 and the simulated deflection signal S15 from a model circuit 15 are input to a subtractor 9, the difference signal is supplied to amplifiers 11, ad to supply corrected simulated deflection signal S15 and simulated deflection speed signal S15' are obtained, and a drive signal S17 for driving the actuator 1 is output from a drive signal forming circuit 17. |
