| 摘要 |
PURPOSE:To eliminate to be marked with misjudging result even if semiconduc tor wafer's order is replaced by a method wherein an identification number is written on a semiconductor wafer by a probing device and is marked by a marking device according to marking data dealing with the identification number read out. CONSTITUTION:An identification number is written to a semiconductor wafer, which electric property test thereof is finished by a semiconductor test section 3, bu using an identification number writing device 5. A semiconductor wafer, whose identification number is finished to read out by an identification number reading-out device 11, is sent to a marking section 13, then marking is performed by sticking an ink etc. At this time, comparing the identification number written to the semiconductor water read out by the identification number read-out device 11 with the identification number registered to recording medium, marking is performed according to marking data group which coincided identification number is resistered. |
