发明名称 EXCIMER LASER
摘要 PURPOSE:To hold constantly the laser output by a method wherein the laser oscillating light to transmit the reflecting mirror is detected and the output signal is made a negative feedback to the power source through the comparison amplifying circuit and the power source control unit. CONSTITUTION:A detector 4 is disposed behind a reflecting mirror 3, whereby an energy proportional to the laser beam output is detected by the detector 4. As the detector 4 is used a thermopile for thermal energy detection. This laser beam output is processed by a comparison amplifying circuit 5 and a signal equivalent to a difference between the output level and the reference level (the output control objective value of a laser tube 1) is made to connect to a power source control circuit 9 by the comparison amplifying circuit 5. When a negative output signal appears from the differential amplifier 8 of the comparison amplifying circuit 5, the output signal is fed to a relay 91 through a diode D1 and a servomotor 95 is made to rotate to a direction whereto the charging voltage of the main capacitor is made to boost.
申请公布号 JPS61164282(A) 申请公布日期 1986.07.24
申请号 JP19850005579 申请日期 1985.01.16
申请人 HAMAMATSU PHOTONICS KK 发明人 HIRANO TATSU
分类号 H01S3/097;H01S3/134 主分类号 H01S3/097
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