Method for preparing a boron-containing gas atmosphere

摘要

The invention relates to a method for preparing a boron-containing gas atmosphere by mixing one or more carrier-gas components with a boron-containing gas and introducing the mixture into the reaction chamber. In order to enable preparation of a boron-containg gas atmosphere by simple means and without proportioning problems it is proposed to pass the mixture of carrier gas component(s) and boron-containing gas into a container and store it there prior to introducing it into the reaction chamber.