| 摘要 |
PURPOSE:To obtain a coated hard member proper for a tool by incorporating P as an impurity into a diamond film so as to improve the adhesion of the diamond film to a substrate. CONSTITUTION:A substrate is coated with a multilayered diamond film contg. P as an impurity in at least one layer by plasma CVD or other method to form a coated hard member for a tool or the like. The proper P content in one layer is 0.005-1%, and the optimum total thickness of the coating film is 0.1-20mum. The coated hard member has superior wear resistance and can be used in the manufacture of a cutting tool, a wear resistant tool, wear resistant sliding parts or the like.
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